Title
Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography.
Year
DOI
Venue
2012
10.1109/NEMS.2012.6196716
NEMS
Keywords
Field
DocType
microfabrication,metals,nanofabrication,nanoelectromechanical systems,rolling,etching,moulding,lithography
Etching,Contact print,Composite material,Mold,Photolithography,Lithography,Materials science,Fabrication,Microfabrication,Molding (process)
Conference
Citations 
PageRank 
References 
0
0.34
0
Authors
3
Name
Order
Citations
PageRank
Kuo-Feng Huang1378.52
Sung-Wen Tsai200.34
Yung-Chun Lee355.73