Title | ||
---|---|---|
Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography. |
Year | DOI | Venue |
---|---|---|
2012 | 10.1109/NEMS.2012.6196716 | NEMS |
Keywords | Field | DocType |
microfabrication,metals,nanofabrication,nanoelectromechanical systems,rolling,etching,moulding,lithography | Etching,Contact print,Composite material,Mold,Photolithography,Lithography,Materials science,Fabrication,Microfabrication,Molding (process) | Conference |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
3 |
Name | Order | Citations | PageRank |
---|---|---|---|
Kuo-Feng Huang | 1 | 37 | 8.52 |
Sung-Wen Tsai | 2 | 0 | 0.34 |
Yung-Chun Lee | 3 | 5 | 5.73 |