Title | ||
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Fast and accurate quasi-three-dimensional capacitance determination of multilayer VLSI interconnects |
Abstract | ||
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A new fast and accurate capacitance determination methodology for intricate multilayer VLSI interconnects is presented. Since a multilayer interconnect structure is too complicated to be directly tractable, it is simplified by investigating charge distributions within the system. The quasi-three-dimensional (3-D) capacitances of the structure are then determined by combining a set of solid-ground-based two-dimensional (2-D) capacitances and shielding effects that can be independently calculated from the simplified structure. The shielding effects due to the neighboring lines of a line can be analytically determined from the given layout dimensions. The solid-ground-based 2-D capacitances can also be quickly computed from the simplified structure. Thus, the proposed capacitance determination methodology is much more cost-efficient than conventional 3-D-based methods. It is shown that the calculated quasi-3-D capacitances have excellent agreement with 3-D field-solver-based results within 5% error. |
Year | DOI | Venue |
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2001 | 10.1109/92.929579 | IEEE Trans. VLSI Syst. |
Keywords | Field | DocType |
quasi-3-d capacitance,accurate capacitance determination methodology,integrated circuit interconnections,capacitance,3-d-based method,layout dimension,3-d field-solver-based result,shielding effect,2-d capacitance,charge distribution,quasi-three-dimensional capacitance,vlsi,proposed capacitance determination methodology,intricate multilayer vlsi interconnects,multilayer vlsi interconnect,accurate quasi-three-dimensional capacitance determination,excellent agreement,frequency,very large scale integration,indexing terms,cost efficiency,three dimensional,electronics packaging | Capacitance,Crosstalk,Electromagnetic shielding,Computer science,Electronic packaging,Electronic engineering,Shielding effect,Interconnection,Very-large-scale integration,Charge density | Journal |
Volume | Issue | ISSN |
9 | 3 | 1063-8210 |
Citations | PageRank | References |
3 | 0.59 | 7 |
Authors | ||
4 |
Name | Order | Citations | PageRank |
---|---|---|---|
Woojin Jin | 1 | 3 | 0.59 |
Yungseon Eo | 2 | 62 | 8.67 |
William R. Eisentadt | 3 | 3 | 0.59 |
Jongin Shim | 4 | 51 | 4.57 |