Title
Fast and accurate quasi-three-dimensional capacitance determination of multilayer VLSI interconnects
Abstract
A new fast and accurate capacitance determination methodology for intricate multilayer VLSI interconnects is presented. Since a multilayer interconnect structure is too complicated to be directly tractable, it is simplified by investigating charge distributions within the system. The quasi-three-dimensional (3-D) capacitances of the structure are then determined by combining a set of solid-ground-based two-dimensional (2-D) capacitances and shielding effects that can be independently calculated from the simplified structure. The shielding effects due to the neighboring lines of a line can be analytically determined from the given layout dimensions. The solid-ground-based 2-D capacitances can also be quickly computed from the simplified structure. Thus, the proposed capacitance determination methodology is much more cost-efficient than conventional 3-D-based methods. It is shown that the calculated quasi-3-D capacitances have excellent agreement with 3-D field-solver-based results within 5% error.
Year
DOI
Venue
2001
10.1109/92.929579
IEEE Trans. VLSI Syst.
Keywords
Field
DocType
quasi-3-d capacitance,accurate capacitance determination methodology,integrated circuit interconnections,capacitance,3-d-based method,layout dimension,3-d field-solver-based result,shielding effect,2-d capacitance,charge distribution,quasi-three-dimensional capacitance,vlsi,proposed capacitance determination methodology,intricate multilayer vlsi interconnects,multilayer vlsi interconnect,accurate quasi-three-dimensional capacitance determination,excellent agreement,frequency,very large scale integration,indexing terms,cost efficiency,three dimensional,electronics packaging
Capacitance,Crosstalk,Electromagnetic shielding,Computer science,Electronic packaging,Electronic engineering,Shielding effect,Interconnection,Very-large-scale integration,Charge density
Journal
Volume
Issue
ISSN
9
3
1063-8210
Citations 
PageRank 
References 
3
0.59
7
Authors
4
Name
Order
Citations
PageRank
Woojin Jin130.59
Yungseon Eo2628.67
William R. Eisentadt330.59
Jongin Shim4514.57