Paper Info
Title
An Integer Linear Programming Approach for Dedicated Machine Constraint
Abstract
Dedicated machine constraint is one of the new challenges introduced in photolithography machinery of the semiconductor manufacturing system due to natural bias. Previous researches either did not take the constraint into account or the proposed heuristic approach might not fit the fast-changing market of semiconductor manufacturing. In this paper, we propose a new framework for the issue of the dedicated machine constraint in semiconductor manufacturing based on an Integer Linear Program (ILP) framework. The ILP framework provides an efficient approach to minimize the producing cost and obtain a global optimal solution in an efficient time. We also present the experiments to validate the proposed approach.
Year
DOI
Venue
2008
10.1109/ICIS.2008.48
ACIS-ICIS
Keywords
Field
DocType
semiconductor manufacturing system,efficient approach,proposed heuristic approach,integer linear programming approach,new framework,semiconductor manufacturing,dedicated machine constraint,new challenge,efficient time,ilp framework,integer linear programming,photolithography,integer programming,global optimization,computer aided manufacturing,scheduling,lithography,constraint optimization,job shop scheduling,linear programming,cost function
Computer-aided manufacturing,Heuristic,Mathematical optimization,Job shop scheduling,Computer science,Semiconductor device fabrication,Integer programming,Linear programming,Constraint logic programming,Constrained optimization
Conference
Citations 
PageRank 
References 
2
0.45
11
Authors
3
Name
Order
Citations
PageRank
Huy Nguyen Anh Pham1162.92
Arthur Shr231.50
Peter P. Chen310271122.69