Title
Properties of contactless and contacted charging in MEMS capacitive switches.
Abstract
•The properties of contacted and contact-less charging have been investigated and correlated.•Contact-less charging can produce partial compensation and mitigates the overall charging.•The characteristic time of charging process is much smaller for the case of contacted charging.•The magnitude of charging current is much larger for the case of contacted charging.•The equivalent charge density for the two charging processes is similar in magnitude.
Year
DOI
Venue
2013
10.1016/j.microrel.2013.07.057
Microelectronics Reliability
Field
DocType
Volume
Electric field,Microelectromechanical systems,Dielectric,Charge injection,Electronic engineering,Capacitive sensing,Engineering,Dipole
Journal
53
Issue
ISSN
Citations 
9
0026-2714
2
PageRank 
References 
Authors
0.48
3
8
Name
Order
Citations
PageRank
M. Koutsoureli1217.67
L. Michalas2145.70
P. Martins320.81
E. Papandreou4145.74
A. Leuliet520.48
S. Bansropun620.48
George Papaioannou7223.93
A. Ziaei821.15