Name
Title | ||
|---|---|---|
Design-for-manufacturability of MEMS convective accelerometers through adaptive electrical calibration strategy |
Abstract | ||
|---|---|---|
In this paper, we explore the use of an adaptive electrical calibration strategy in the context of design-for-manufacturing for MEMS convective accelerometers. The calibration principle relies on the adjustment of the heater power level such that sensitivity is set to a given target value. The idea is to define multiple sensitivity targets in order to improve production yield and to insert a criterion on power consumption. Different device binning can then be achieved depending on test limit settings. Results obtained from Monte-Carlo simulation are presented to demonstrate potentialities of the technique. |
Year | DOI | Venue |
|---|---|---|
2012 | 10.1109/LATW.2012.6261237 | LATW '12 Proceedings of the 2012 13th Latin American Test Workshop - LATW |
Keywords | Field | DocType |
different device binning,heater power level,production yield,target value,power consumption,mems convective accelerometers,monte-carlo simulation,multiple sensitivity target,adaptive electrical calibration strategy,calibration principle,interpolation,design for manufacturing,cmos integrated circuits,mems,calibration,cmos technology,impedance,test,heating | Convection,Microelectromechanical systems,Accelerometer,Interpolation,Electrical impedance,CMOS,Electronic engineering,Engineering,Design for manufacturability,Calibration | Conference |
ISBN | Citations | PageRank |
978-1-4673-2355-0 | 1 | 0.37 |
References | Authors | |
0 | 4 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| A. A. Rekik | 1 | 7 | 2.33 |
| F. Azais | 2 | 44 | 9.29 |
| Frédérick Mailly | 3 | 25 | 11.37 |
| P. Nouet | 4 | 48 | 14.29 |