Paper Info
Title
Evaluation of lot release policies for cycle time improvement in semiconductor manufacturing systems: a Petri net approach
Abstract
We present a framework to approximate and improve the cycle time of semiconductor manufacturing fabs. We model the system as a generalized stochastic Petri-net and compare it to previous approaches, evaluate the advantages and consider this framework as an alternative to simulation models for practitioners. Using this framework the effect of applying certain control rules can be examined. These rules are often implicit and informal and are applied based on experience of operation managers with the goal of cycle time reduction. The present framework can provide the means to examine the effectiveness of such rules and help the operation managers make informed decisions regarding the application of such control rules.
Year
DOI
Venue
2012
10.5555/2429759.2430223
Winter Simulation Conference
Keywords
Field
DocType
semiconductor manufacturing system,generalized stochastic,cycle time improvement,semiconductor manufacturing fabs,operation manager,cycle time,lot release policy,cycle time reduction,present framework,control rule,certain control rule,previous approach
Petri net,Systems engineering,Computer science,Simulation,Semiconductor device fabrication,Simulation modeling
Conference
ISBN
Citations 
PageRank 
978-1-4799-2077-8
0
0.34
References 
Authors
3
2
Name
Order
Citations
PageRank
Laura J. Oyuela Eslava100.34
Raha Akhavan-Tabatabaei26611.78