Title
Improvement of photodiodes in 0.35 µm BiCMOS technology
Abstract
Summary  An improvement of monolithically integrated photodiodes in a p-type substrate of a commercial high-speed 0.35 µm SiGe heterojunction transistor (HBT) BiCMOS technology, with a supply voltage of 5 V, is presented. The detectors combine low capacitance with high bandwidth and responsivity which are realized with only slight process modifications with negligible influence on the transistor parameters. We achieve a speed improvement which results, e.g., in a bandwidth of 475 MHz and a responsivity of 0.17 A/W at blue light and a reverse bias voltage of 4 V. These detectors are designed to be applicable over the wide spectrum of technologically significant optical carrier wavelengths from near-infrared to blue and ultraviolet.
Year
DOI
Venue
2008
10.1007/s00502-008-0516-1
Elektrotechnik und Informationstechnik
Keywords
DocType
Volume
bicmos,oeic,monolithic,pin,photodiode
Journal
125
Issue
ISSN
Citations 
3
1613-7620
0
PageRank 
References 
Authors
0.34
0
3
Name
Order
Citations
PageRank
A. Marchlewski100.34
Kerstin Schneider-Hornstein2103.55
H. Zimmermann35715.95