Title
Suppression Of Current Collapse Of High-Voltage Algan/Gan Hfets On Si Substrates By Utilizing A Graded Field-Plate Structure
Abstract
Current collapse of AlGaN/GaN heterostructure field-effect transistors (HFETs) formed on qualified epitaxial layers on Si substrates was successfully suppressed using graded field-plate (FP) structures. To improve the reproducibility of the FP structure manufacturing process, a simple process for linearly graded SiO2 profile formation was developed. An HFET with a graded FP structure exhibited a significant decrease in an on-resistance increase ratio of 1.16 even after application of a drain bias of 600 V.
Year
DOI
Venue
2012
10.1587/transele.E95.C.1343
IEICE TRANSACTIONS ON ELECTRONICS
Keywords
DocType
Volume
AlGaN/GaN HFETs, current collapse, field plate, on-resistance
Journal
E95C
Issue
ISSN
Citations 
8
0916-8524
0
PageRank 
References 
Authors
0.34
0
6
Name
Order
Citations
PageRank
Tadayoshi Deguchi100.34
Hideshi Tomita200.34
Atsushi Kamada300.34
Manabu Arai400.68
K. Yamasaki520.97
Takashi Egawa6133.98