Name
Abstract | ||
|---|---|---|
We propose a high-yield fabrication processing technique for the MEMS (micro electro mechanical system) modulators integrated with two-dimensional photonic crystal waveguides. Polysilicon microactuators for evanescent modulation was successfully developed by using the vapor hydrofluoric-acid releasing technique for stiction-free sacrificial release, during which the SOI photonic-crystal waveguides were protected under the LPCVD silicon nitride film. Post-release anneal was found to be needed to remove the byproduct made by the reaction of hydrofluoric acid with silicon nitride film. Preliminary optical modulation result (-2 dB modulation with 86V) was experimentally obtained. |
Year | DOI | Venue |
|---|---|---|
2006 | 10.1587/elex.3.39 | IEICE ELECTRONICS EXPRESS |
Keywords | Field | DocType |
optical modulators, electrostatic actuators, photonic integrated circuits, 2-dimensinal photonic crystal waveguide | Optical modulator,Silicon on insulator,Microelectromechanical systems,Computer science,Waveguide,Electronic engineering,Photonic integrated circuit,Silicon nitride,Fabrication,Chemical vapor deposition | Journal |
Volume | Issue | ISSN |
3 | 3 | 1349-2543 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
9 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| A. Higo | 1 | 0 | 0.68 |
| S. Iwamoto | 2 | 0 | 0.34 |
| S. Ishida | 3 | 0 | 0.34 |
| Y. Arakawa | 4 | 0 | 0.34 |
| M. Tokushima | 5 | 2 | 1.19 |
| Akiko Gomyo | 6 | 8 | 2.06 |
| H. Yamada | 7 | 408 | 60.56 |
| hiroyuki fujita | 8 | 4 | 3.96 |
| hiroshi toshiyoshi | 9 | 4 | 3.29 |