Name
Title | ||
|---|---|---|
The effect of nano-scale interaction forces on the premature pull-in of real-life Micro-Electro-Mechanical Systems. |
Abstract | ||
|---|---|---|
A new experimental device has been designed and produced with the purpose of investigating the possible effect of nano-scale interaction forces on the reliability issue related to pull-in of uncharged plates. This paper reports the outcomes of the experimental tests carried out on the aforementioned micro-structure, which presents the essential features of real-life MEMS and is produced using the same technology as standard commercial devices. The experiments show, with a high degree of repeatability, a premature failure of the structure, as a consequence of pull-in instability. The results of the tests are critically evaluated by comparison with theoretical predictions, in order to assess the role played by nanoscale interaction forces caused by, e.g., parasitic charging, contact and patch potentials, Casimir force. (C) 2011 Elsevier Ltd. All rights reserved. |
Year | DOI | Venue |
|---|---|---|
2012 | 10.1016/j.microrel.2011.08.021 | Microelectronics Reliability |
Field | DocType | Volume |
Nanoscopic scale,Microelectromechanical systems,Instability,Premature failure,Engineering,Casimir effect,Interaction forces,Structural engineering | Journal | 52 |
Issue | ISSN | Citations |
1 | 0026-2714 | 0 |
PageRank | References | Authors |
0.34 | 6 | 5 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| R. Ardito | 1 | 0 | 0.34 |
| A. Frangi | 2 | 2 | 3.18 |
| Alberto Corigliano | 3 | 19 | 5.56 |
| B. De Masi | 4 | 1 | 1.11 |
| G. Cazzaniga | 5 | 0 | 0.34 |