Paper Info
Title
Positioning performance and straightness error compensation of the magnetic levitation stage supported by the linear magnetic bearing
Abstract
This paper reports high-precision motion control at the target position and the offline compensation of the straightness error occurring during the motion of the magnetically levitated stage supported by the linear magnetic bearing. The linear magnetic bearing is composed of electromagnets and sensors in the same module to enable easy maintenance and to reduce the machining error, and the conventional linear quadratic Gaussian control is adopted for the motion control of the stage. The test results show that the stage can compensate the straightness error precisely, so that it is expected that this stage can be applied to high-precision linear motion applications.
Year
DOI
Venue
2003
10.1109/TIE.2003.809415
IEEE Transactions on Industrial Electronics
Keywords
Field
DocType
Magnetic levitation,Error compensation,Motion control,Magnetic sensors,Feedback,Sensor systems,Error correction,Electromagnets,Machinery,Capacitive sensors
Motion control,Linear motion,Linear-quadratic-Gaussian control,Control theory,Electromagnet,Capacitive sensing,Control engineering,Magnetic levitation,Magnetic bearing,Engineering,Motion system
Journal
Volume
Issue
ISSN
50
2
0278-0046
Citations 
PageRank 
References 
13
1.22
0
Authors
3
Name
Order
Citations
PageRank
Oui-Serg Kim1131.22
Sang-Ho Lee2777.76
Dong-Chul Han3152.53