Name
Abstract | ||
|---|---|---|
In this paper, an architecture designed for electrical measurement of the quality factor of MEMS resonators is proposed. An estimation of the measurement performance is made using PSPICE simulations taking into account the component's non-idealities. An error on the measured Q value of only several percent is achievable, at a small integration cost, for sufficiently high quality factor values (Q > 100). |
Year | Venue | Keywords |
|---|---|---|
2008 | symposium on design, test, integration and packaging of mems/moems | quality factor |
Field | DocType | Volume |
Architecture,Microelectromechanical systems,Computer science,Resonator,Electronic engineering,Electrical engineering | Journal | abs/0802.3 |
ISSN | Citations | PageRank |
Dans Symposium on Design, Test, Integration and Packaging of
MEMS/MOEMS - DTIP 2007, Stresa, lago Maggiore : Italie (2007) | 4 | 1.89 |
References | Authors | |
2 | 7 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Hervé Mathias | 1 | 12 | 5.30 |
| Fabien Parrain | 2 | 34 | 6.69 |
| Jean-paul Gilles | 3 | 4 | 2.56 |
| Souhil Megherbi | 4 | 4 | 2.23 |
| Ming Zhang | 5 | 15 | 7.12 |
| Philippe Coste | 6 | 4 | 1.89 |
| Antoine Dupret | 7 | 45 | 16.43 |