Title
Thin germanium dioxide film with a high quality interface formed in a direct neutral beam oxidation process.
Year
DOI
Venue
2012
10.1109/ESSDERC.2012.6343339
ESSDERC
Keywords
Field
DocType
oxidation
Substrate (chemistry),Analytical chemistry,Hydrogen,Oxide,Suboxide,Germanium dioxide,Oxygen,Thin film,Materials science,Activation energy
Conference
Citations 
PageRank 
References 
0
0.34
0
Authors
4
Name
Order
Citations
PageRank
Akira Wada100.34
Seiji Samukawa201.01
Rui Zhang301.01
Shinichi Takagi439.69