Name
Abstract | ||
|---|---|---|
In this paper, a novel single crystal silicon probe for micromechanical surface profilers is presented, which uses a double-ended tuning fork (DETF) resonator as the displacement-sensing element. The frequency shift of the DETF caused by the induced axial stress is directly proportional to the displacement input. One or two stages micro-leverage mechanisms are introduced for force amplification to increase the overall sensitivity. The ANSYS simulation results depict the resonator has a nominal resonant frequency of 56 kHz under atmosphere at room temperature. The overall sensitivity is over 330Hz/μm. The probe is fabricated through a standard silicon-on-glass process with device thickness of 45 μm. ©2010 IEEE. |
Year | DOI | Venue |
|---|---|---|
2010 | 10.1109/NEMS.2010.5592110 | NEMS |
Keywords | Field | DocType |
displacement measurement,double-ended-tuning-fork (detf) resonator,microleverage,silicon-glass bonding,micromachining,room temperature,resonant frequency,force,vibrations,silicon | Cylinder stress,Analytical chemistry,Surface micromachining,Single crystal,Resonator,Vibration,Tuning fork,Materials science,Fabrication,Silicon | Conference |
Volume | Issue | Citations |
null | null | 1 |
PageRank | References | Authors |
0.63 | 0 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Senlin Jiang | 1 | 1 | 0.96 |
| Dacheng Zhang | 2 | 32 | 12.02 |
| Zhenchuan Yang | 3 | 23 | 12.18 |
| Guizhen Yan | 4 | 34 | 12.22 |