Title
Computational challenges in simulations of ULSI semiconductor devices
Abstract
Semiconductor process, device, and circuit simulation plays a significant role in the development of integrated circuit technology, providing quick prototyping and quantities not easily measured. Predictive models allow optimization of chip designs and are an essential component of the technology design process. As semiconductor devices shrink into the deep-submicron regime, device simulation faces new challenges, necessitating improvements in both physical understanding and numerical capabilities. The authors first review the state-of-the-art of semiconductor simulation and then outline some of the challenges.<>
Year
DOI
Venue
1994
10.1109/HICSS.1994.323190
System Sciences, 1994. Proceedings of the Twenty-Seventh Hawaii International Conference  
Keywords
Field
DocType
VLSI,digital simulation,semiconductor device models,ULSI semiconductor devices,circuit simulation,integrated circuit technology,predictive models,semiconductor circuit simulation,semiconductor device simulation,semiconductor process simulation,semiconductor simulation
Semiconductor process simulation,Semiconductor device modeling,Computer science,Design technology,Semiconductor device fabrication,Electronic engineering,Integrated circuit,Chip-scale package,Very-large-scale integration,Management science,Virtual prototyping
Conference
Volume
Citations 
PageRank 
1
0
0.34
References 
Authors
0
3
Name
Order
Citations
PageRank
R. Kent Smith1586.39
W. M. Coughran, Jr.2498.27
Coughran, W.M., Jr.300.34