Name
Title | ||
|---|---|---|
Zernike representation of angle-resolved Mueller matrix for dimensional analysis of nanoscale structures |
Abstract | ||
|---|---|---|
The angle-resolved Mueller matrix polarimetry has been recently introduced for dimensional metrology of nanoscale structures. Due to the redundant information contained in the measured Mueller matrix, it is difficult to find the implicit relationship between the geometrical parameters of the structure and the elements of the Mueller matrix. In this paper, a novel method based on Zernike representation is proposed to simplify the analysis of the angle-resolved Mueller matrix. The simulation results have demonstrated that the Zernike coefficients can be applied as useful metrics for dimensional analysis of nanoscale structures. |
Year | DOI | Venue |
|---|---|---|
2011 | 10.1109/NEMS.2011.6017404 | NEMS |
Keywords | Field | DocType |
zernike representation,nanometrolgy,photolithography,zernike polynomial,zernike polynomials,nanomanufacturing,angle-resolved,angle-resolved mueller matrix polarimetry,matrix algebra,polarimetry,dimensional metrology,nanoscale structures,dimensional analysis,mueller matrix polarimetry,proximity effect (lithography),mueller matrix | Mueller calculus,Analytical chemistry,Nanoscopic scale,Polarimetry,Matrix algebra,Optics,Photolithography,Zernike polynomials,Nanomanufacturing,Dimensional metrology,Materials science | Conference |
Volume | Issue | ISBN |
null | null | 978-1-61284-775-7 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Xiuguo Chen | 1 | 0 | 1.01 |
| Shiyuan Liu | 2 | 17 | 8.28 |
| Chuanwei Zhang | 3 | 1 | 1.73 |
| Yuan Ma | 4 | 16 | 3.89 |