Title
NEMS Capacitive Sensors for Highly Sensitive, Label-Free Nucleic-Acid Analysis
Abstract
A highly sensitive NEMS capacitive sensor with electrode separation in the order of Debye length is fabricated for label free DNA analysis. The use of nano-scale electrode separation provides better insight in to the target-probe interaction which was not previously attainable with macro or even micro scale devices. As the double layers from both the capacitive electrodes merge together and occupy a major fraction of the capacitive volume, the contribution from bulk sample resistance and noises due to electrode polarization effects are eliminated. The dielectric properties during hybridization reaction were measured using 10-mer nucleotide sequences. A 45-50% change in relative permittivity (capacitance) was observed due to DNA hybridization at 10Hz. Capacitive sensors with 30nm electrode separation were fabricated using standard silicon micro/nano technology and show promise for future electronic DNA arrays and high throughput screening of nucleic acid samples.
Year
DOI
Venue
2008
10.1007/978-3-642-02427-6_5
Lecture Notes of the Institute for Computer Sciences, Social Informatics, and Telecommunications Engineering
Keywords
Field
DocType
Micro/Nanofabrication,Capacitive Sensor,Biosensors,DNA detection
Nanotechnology,Nucleic acid quantitation,Capacitance,Dielectric,Capacitive sensing,Polarization (electrochemistry),Relative permittivity,Biosensor,Materials science,Electrode
Conference
Volume
ISSN
Citations 
3
1867-8211
0
PageRank 
References 
Authors
0.34
1
5
Name
Order
Citations
PageRank
Manu Sebastian Mannoor100.34
Teena James200.34
Dentcho V. Ivanov300.34
Les Beadling400.34
William Braunlin500.34