Name
Abstract | ||
|---|---|---|
This paper focuses on the fatigue characteristics of the single crystal silicon (SC-Si) cantilever in relation with the critical design of micro electro-mechanical systems (MEMS). Development of MEMS actuators for optical communication usage is carried out successfully, for example, in optical switches and variable optical attenuators (VOA). In those devices, fatigue characteristics of the MEMS structure are crucial to its practical application. However, fatigue tests using real structures have not been carried out well. In this research, the fatigue life has been inspected at the actual device, under actual usage conditions for the first time. We obtained fracture rate lambda from experimental results, and the value of Failure in Time (FIT) lambda was about 0.3 FIT. This result indicates that these MEMS devices having enough reliability for practical usage. |
Year | DOI | Venue |
|---|---|---|
2005 | 10.1093/ietele/e88-c.5.1020 | IEICE TRANSACTIONS ON ELECTRONICS |
Keywords | Field | DocType |
silicon-cantilever, fatigue, S-N curve, Weibull distribution, FIT number | Optical attenuator,Durability,Microelectromechanical systems,Optical switch,Optical communication,Cantilever,Attenuator (electronics),Electronic engineering,Engineering,Actuator | Journal |
Volume | Issue | ISSN |
E88C | 5 | 1745-1353 |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
3 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Takayuki Shimazu | 1 | 0 | 1.35 |
| Makoto Katayama | 2 | 0 | 0.34 |
| Yoshitada Isono | 3 | 0 | 0.34 |