Name
Abstract | ||
|---|---|---|
This article proposes a high-Q value Whispering-Gallery Mode (WGM) microdisk resonator, which is surrounded by photonic crystal with square lattice. Finite element method (FEM) is performed to model the microdisk resonator, and an ultrahigh quality factor (Q) value of 1.37×108 can be achieved at the wavelength of 1435.4nm. The proposed microdisk resonator is realized on a silicon-on-insulator (SOI) substrate. These structures of the device are defined by electron beam lithography, and then transferred into silicon layer by ion beam etching. The buried oxide layer is removed to generate freestanding photonic crystal and suspended microdisk. |
Year | DOI | Venue |
|---|---|---|
2013 | 10.1109/NEMS.2013.6559752 | NEMS |
Keywords | Field | DocType |
q-factor,high q value,microdisk resonator,soi substrate,buried oxide layer,sputter etching,high-q value whispering-gallery mode microdisk resonator,ion beam etching,ultrahigh quality factor value,micromechanical resonators,square lattice,wgm mode,freestanding photonic crystal,electron beam lithography,fem,photonic crystals,silicon-on-insulator,silicon,finite element method,freestanding whispering-gallery mode microdisk resonator,high-q value wgm microdisk resonator,silicon-on-insulator substrate,finite element analysis,si,elemental semiconductors,wavelength 1435.4 nm,suspended microdisk,optical waveguides,q factor,lattices,silicon on insulator | Silicon on insulator,Q factor,Photonic crystal,Resonator,Optics,Whispering-gallery wave,Electron-beam lithography,Materials science,Silicon,Wavelength | Conference |
Volume | Issue | ISSN |
null | null | null |
ISBN | Citations | PageRank |
978-1-4673-6351-8 | 0 | 0.34 |
References | Authors | |
0 | 5 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Zheng Shi | 1 | 0 | 0.34 |
| Shumin He | 2 | 0 | 0.34 |
| Hongbo Zhu | 3 | 0 | 0.34 |
| Miao Zhang | 4 | 1 | 1.33 |
| Yongjin Wang | 5 | 22 | 5.75 |