Name
Title | ||
|---|---|---|
Simulation and design of micro pressure sensors applied to measure the intracranial pressure |
Abstract | ||
|---|---|---|
This paper reports a micrometer level pressure sensor to measure the intracranial pressure (ICP). The sensor is based on the piezoresistive effect. The piezoresistive pressure sensor is simulated and designed by using nonlinear programming Optimizing and Finite Element Analysis (FEA) tools. The sensor is fabricated by MEMS process. From tests, the sensor samples performances match up the design. |
Year | DOI | Venue |
|---|---|---|
2013 | 10.1109/NEMS.2013.6559695 | NEMS |
Keywords | Field | DocType |
piezoresistive effect,design,piezoresistive devices,intracranial pressure measurement,biomems,biomedical measurement,mems process,pressure sensors,icp,microsensors,mems,micropressure sensor simulation,sensor,micrometer level pressure sensor,simulation,microfabrication,nonlinear programming optimizing tools,finite element analysis,micropressure sensor design,sensor fabrication,piezoresistive pressure sensor,programming,stress | Nanotechnology,Composite material,Microelectromechanical systems,Nonlinear programming,Mechanical engineering,Intracranial pressure,Finite element method,Pressure sensor,Materials science,Micrometer,Piezoresistive effect,Microfabrication | Conference |
Volume | Issue | ISSN |
null | null | null |
ISBN | Citations | PageRank |
978-1-4673-6351-8 | 0 | 0.34 |
References | Authors | |
2 | 3 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Bo Pang | 1 | 5795 | 451.00 |
| Zhaohua Zhang | 2 | 0 | 0.34 |
| Tianling Ren | 3 | 25 | 11.75 |