Name
Abstract | ||
|---|---|---|
Self-aligned double patterning (SADP) has become a preferred double patterning technology, due to its better overlay controllability. Two types of layout decomposition schemes are used to define two-dimensional layout patterns in SADP: Spacer-is-Metal (SIM) and Spacer-is-Dielectric (SID), and SIM-type layout decomposition typically has higher decomposition flexibility (especially for gridless designs). While SID-type layout decomposition has been studied extensively, however, only one previous work extended a satisfiability-based SID-type decomposer to SIM-type layout decomposition; this SAT-based method is inefficient for large-scale designs and not applicable to non-decomposable layouts. This paper introduces an efficient graph-based SIM-type layout decomposition heuristic. The decomposition problem is first transformed into a constrained set-covering problem. Then, an efficient algorithm composed of a greedy heuristic followed by a partition-based solution refinement scheme is proposed to simultaneously minimize the conflicts on both core masks and cut masks. Experimental results show that the algorithm can efficiently derive a good decomposition solution with minimized pattern conflicts. |
Year | DOI | Venue |
|---|---|---|
2015 | 10.1109/ASPDAC.2015.7059085 | ASP-DAC |
Keywords | Field | DocType |
spacer-is-metal,graph-based sim-type layout decomposition heuristic,spacer-is-dielectric,two-dimensional layout patterns,cut masks,sid-type layout decomposition,self-aligned double patterning,sadp,satisfiability-based sid-type decomposer,set theory,layout decomposition schemes,constrained set-covering problem,lithography,greedy heuristic,masks,graph theory,core masks,integrated circuit layout,partition-based solution refinement scheme,decomposition flexibility,overlay controllability,double patterning technology | Heuristic,Mathematical optimization,Controllability,Computer science,Satisfiability,Algorithm,Greedy algorithm,Electronic engineering,Multiple patterning,Overlay,Partition (number theory),Decomposition | Conference |
ISSN | Citations | PageRank |
2153-6961 | 2 | 0.44 |
References | Authors | |
10 | 3 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Shao-Yun Fang | 1 | 116 | 17.07 |
| Yi-Shu Tai | 2 | 2 | 0.44 |
| Yao-Wen Chang | 3 | 3437 | 253.54 |