Title
Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System
Abstract
Iterative feedback tuning (IFT) enables the data-driven tuning of controller parameters without the explicit need for a parametric model. It is known, however, that IFT can lead to nonrobust solutions. The aim of this paper is to develop an IFT approach with robustness constraints. A constrained IFT problem is formulated that is solved by introducing a penalty function. Essentially, the gradient estimates decompose into: 1) the well-known IFT gradients and 2) the gradients with respect to this penalty function. The latter are obtained through a nonparametric model of the controlled system. This guarantees robust stability while only requiring a nonparametric model. The experimental results obtained from the motion control systems of an industrial wafer scanner confirm enhanced performance with guaranteed robustness estimates.
Year
DOI
Venue
2016
10.1109/TCST.2015.2418311
Control Systems Technology, IEEE Transactions  
Keywords
Field
DocType
Robustness,Tuning,Optimization,Frequency-domain analysis,Context,Feedforward neural networks,Semiconductor device modeling
Frequency domain,Control theory,Feedforward neural network,Motion control,Parametric model,Control theory,Control engineering,Robustness (computer science),Robust control,Mathematics,Penalty method
Journal
Volume
Issue
ISSN
PP
99
1063-6536
Citations 
PageRank 
References 
6
0.50
10
Authors
3
Name
Order
Citations
PageRank
Marcel François Heertjes1121.79
Bart Van der Velden260.50
Oomen, T.39517.42