Title | ||
---|---|---|
Multiphysics modeling approach for micro electro-thermo-mechanical actuator: Failure mechanisms coupled analysis. |
Abstract | ||
---|---|---|
•The reliability of actuators was evaluated by failure mechanism-coupled analysis.•Modelling of failures was prioritized by FMMEA.•Application of the method provided important suggestions for actuators’ design.•The proposed approach could greatly reduce design cost and improve its efficiency. |
Year | DOI | Venue |
---|---|---|
2015 | 10.1016/j.microrel.2015.02.012 | Microelectronics Reliability |
Keywords | Field | DocType |
μETMA,Multiphysics modeling,FMMEA,Coupled failure mechanisms | Deflection (engineering),Thermal,Coupling,Multiphysics,Mechanical engineering,Residual stress,Deformation (engineering),Engineering,Thermal fatigue,Actuator,Structural engineering | Journal |
Volume | Issue | ISSN |
55 | 5 | 0026-2714 |
Citations | PageRank | References |
0 | 0.34 | 7 |
Authors | ||
4 |
Name | Order | Citations | PageRank |
---|---|---|---|
Jinling Wang | 1 | 0 | 0.34 |
Shengkui Zeng | 2 | 19 | 4.71 |
Vadim V. Silberschmidt | 3 | 0 | 0.68 |
Jianbin Guo | 4 | 3 | 2.43 |