Title
Multiphysics modeling approach for micro electro-thermo-mechanical actuator: Failure mechanisms coupled analysis.
Abstract
•The reliability of actuators was evaluated by failure mechanism-coupled analysis.•Modelling of failures was prioritized by FMMEA.•Application of the method provided important suggestions for actuators’ design.•The proposed approach could greatly reduce design cost and improve its efficiency.
Year
DOI
Venue
2015
10.1016/j.microrel.2015.02.012
Microelectronics Reliability
Keywords
Field
DocType
μETMA,Multiphysics modeling,FMMEA,Coupled failure mechanisms
Deflection (engineering),Thermal,Coupling,Multiphysics,Mechanical engineering,Residual stress,Deformation (engineering),Engineering,Thermal fatigue,Actuator,Structural engineering
Journal
Volume
Issue
ISSN
55
5
0026-2714
Citations 
PageRank 
References 
0
0.34
7
Authors
4
Name
Order
Citations
PageRank
Jinling Wang100.34
Shengkui Zeng2194.71
Vadim V. Silberschmidt300.68
Jianbin Guo432.43