Name
Title | ||
|---|---|---|
A 6.7 MHz nanoelectromechanical ring oscillator using curved cantilever switches coated with amorphous carbon |
Abstract | ||
|---|---|---|
Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low power digital electronics. This paper reports the demonstration of the first ring oscillator built using cell-level digital logic elements based on curved NEM switches. The NEM switch has a size of 5×3 μm2, an air gap of 60 nm and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator is a key milestone on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation. |
Year | DOI | Venue |
|---|---|---|
2014 | 10.1109/ESSDERC.2014.6948759 | Solid State Device Research Conference |
Keywords | Field | DocType |
cantilevers,carbon,logic gates,low-power electronics,microswitches,nanoelectromechanical devices,nanoelectronics,oscillators,C,CMOS transistors,VLSI implementation,amorphous carbon,cell-level digital logic elements,curved NEM switches,curved cantilever switches,frequency 6.7 MHz,inverter propagation delay,nanoelectromechanical ring oscillator,nanoelectromechanical switches,size 3 mum,size 5 mum,size 60 nm,subnanosecond switching times,time 25 ns,ultra-low power digital electronics,NEM switches,NEMS,VLSI,amorphous carbon,curved cantilever,digital logic design,ring oscillator | Inverter,Ring oscillator,Digital electronics,Propagation delay,Electronic engineering,CMOS,Transistor,Materials science,Very-large-scale integration,Electrical engineering,Nanoelectromechanical systems | Conference |
ISSN | Citations | PageRank |
1930-8876 | 2 | 0.42 |
References | Authors | |
2 | 7 | |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Christopher Lawrence Ayala | 1 | 4 | 2.17 |
| Daniel Grogg | 2 | 10 | 2.43 |
| Antonios Bazigos | 3 | 6 | 3.44 |
| Montserrat Fernandez-Bolaños Badia | 4 | 2 | 0.42 |
| Urs Dürig | 5 | 2 | 0.42 |
| M. Despont | 6 | 21 | 3.16 |
| Christoph Hagleitner | 7 | 108 | 20.84 |