Name
Title | ||
|---|---|---|
Next-generation wafer stage motion control: Connecting system identification and robust control |
Abstract | ||
|---|---|---|
Next-generation precision motion systems are lightweight to meet stringent requirements regarding throughput and accuracy. Such lightweight systems typically exhibit lightly damped flexible dynamics in the controller cross-over region. State-of-the-art modeling and motion control design procedures do not deliver the required model fidelity to control the flexible dynamical behavior. In this paper, identification and control challenges are investigated and a novel approach for next-generation motion control is presented. The procedure is applied to a multivariable wafer stage, confirming a significant performance improvement. |
Year | DOI | Venue |
|---|---|---|
2012 | 10.1109/ACC.2012.6314685 | American Control Conference |
Keywords | Field | DocType |
identification,integrated circuit manufacture,mass production,motion control,multivariable control systems,process control,robust control,semiconductor technology,controller cross-over region,integrated circuits,lightly damped flexible dynamics,mass production,multivariable wafer stage,next-generation precision motion systems,next-generation wafer stage motion control,robust control,system identification | Motion control,Control theory,Multivariable calculus,Control theory,Computer science,Control engineering,Robustness (computer science),Process control,System identification,Robust control,Performance improvement | Conference |
ISSN | ISBN | Citations |
0743-1619 E-ISBN : 978-1-4673-2102-0 | 978-1-4673-2102-0 | 0 |
PageRank | References | Authors |
0.34 | 0 | 8 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Tom Oomen | 1 | 61 | 9.63 |
| Robbert van Herpen | 2 | 27 | 4.27 |
| Sander Quist | 3 | 11 | 1.05 |
| Marc van de Wal | 4 | 81 | 8.58 |
| Okko H. Bosgra | 5 | 109 | 16.28 |
| Maarten Steinbuch | 6 | 658 | 96.53 |
| van Herpen, R. | 7 | 3 | 1.39 |
| van de Wal, M. | 8 | 2 | 1.00 |