Title
Highly uniform and low-loss passive silicon photonics devices using a 300mm CMOS platform
Abstract
Using an advanced 300mm CMOS-platform, we report record-low and highly-uniform propagation loss: 0.45±0.12dB/cm for wires, and 2dB/cm for slot waveguides. For WDM devices, we demonstrate channel variation(3-σ) within-wafer and within-device of 6.1nm and 1.2nm respectively.
Year
DOI
Venue
2014
10.1364/OFC.2014.Th2A.33
Optical Fiber Communications Conference and Exhibition
Keywords
DocType
Citations 
cmos integrated circuits,elemental semiconductors,integrated optics,optical losses,optical waveguides,silicon,wavelength division multiplexing,wires,cmos platform,si,channel variation,highly uniform passive silicon photonics devices,low-loss passive silicon photonics devices,propagation loss,size 300 mm,size 6.1 nm to 1.2 nm,slot waveguides,wavelength-division multiplexing devices,waveguides
Conference
3
PageRank 
References 
Authors
0.93
0
11