Title | ||
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Highly uniform and low-loss passive silicon photonics devices using a 300mm CMOS platform |
Abstract | ||
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Using an advanced 300mm CMOS-platform, we report record-low and highly-uniform propagation loss: 0.45±0.12dB/cm for wires, and 2dB/cm for slot waveguides. For WDM devices, we demonstrate channel variation(3-σ) within-wafer and within-device of 6.1nm and 1.2nm respectively. |
Year | DOI | Venue |
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2014 | 10.1364/OFC.2014.Th2A.33 | Optical Fiber Communications Conference and Exhibition |
Keywords | DocType | Citations |
cmos integrated circuits,elemental semiconductors,integrated optics,optical losses,optical waveguides,silicon,wavelength division multiplexing,wires,cmos platform,si,channel variation,highly uniform passive silicon photonics devices,low-loss passive silicon photonics devices,propagation loss,size 300 mm,size 6.1 nm to 1.2 nm,slot waveguides,wavelength-division multiplexing devices,waveguides | Conference | 3 |
PageRank | References | Authors |
0.93 | 0 | 11 |
Name | Order | Citations | PageRank |
---|---|---|---|
shankar kumar selvaraja | 1 | 3 | 0.93 |
peter de heyn | 2 | 4 | 5.09 |
gustaf winroth | 3 | 3 | 0.93 |
patrick ong | 4 | 3 | 0.93 |
Guy Lepage | 5 | 9 | 3.46 |
celine cailler | 6 | 3 | 0.93 |
Arnaud Rigny | 7 | 3 | 1.27 |
k k bourdelle | 8 | 3 | 0.93 |
d vanthourhout | 9 | 3 | 0.93 |
Dries Van Thourhout | 10 | 19 | 6.59 |
p absil | 11 | 5 | 3.88 |