Title
High-speed InGaAs photodetectors with low dark current selectively grown on SOI substrate
Abstract
We report selective growth of high crystalline quality InGaAs photodetectors (PDs) with optimized InP/GaAs buffers on patterned SOI substrates by MOCVD. Both waveguide and normal-incidence PDs show low dark current and high-speed performance.
Year
DOI
Venue
2014
10.1364/OFC.2014.M2G.2
Optical Fiber Communications Conference and Exhibition
Keywords
DocType
Citations 
iii-v semiconductors,mocvd,buffer layers,dark conductivity,gallium arsenide,indium compounds,photodetectors,semiconductor growth,ingaas,inp-gaas,inp/gaas buffers,si,high-speed photodetectors,low dark current,normal-incidence photodetectors,patterned soi substrates,waveguide
Conference
0
PageRank 
References 
Authors
0.34
0
4
Name
Order
Citations
PageRank
Yu Geng100.34
Shaoqi Feng200.34
Poon, A.W.300.34
Kei May Lau433.54