Paper Info
Title
Low pull-in voltage electrostatic MEMS switch using liquid dielectric
Abstract
In this paper, we present an electrostatic MEMS switch with liquids as dielectric to reduce the actuation voltage. The concept is verified by simulating a lateral dual gate switch, where the required pull-in voltage is reduced by more than 8 times after using water as a dielectric, to become as low as 5.36V. The proposed switch is simulated using COMSOL multiphysics using various liquid volumes to study their effect on the switching performance. Finally, we propose the usage of the lateral switch as a single switch XOR logic gate.
Year
DOI
Venue
2014
10.1109/MWSCAS.2014.6908379
Circuits and Systems
Keywords
Field
DocType
dielectric liquids,electrostatic devices,logic gates,low-power electronics,microswitches,comsol multiphysics simulation,lateral dual gate switch,liquid dielectric,low pull-in voltage electrostatic mems switch,single switch xor logic gate,voltage 5.36 v
Microelectromechanical systems,Liquid dielectric,Computer science,Voltage,Gate dielectric,Electronic engineering
Conference
ISSN
Citations 
PageRank 
1548-3746
0
0.34
References 
Authors
0
3
Name
Order
Citations
PageRank
Zidan, M.A.100.34
jurgen kosel21310.33
Khaled N. Salama334546.11