Paper Info
Title
On the use of the matrix pencil method for deep level transient spectroscopy: MP-DLTS
Abstract
A new approach to capacitance transient analysis, based on the matrix pencil (MP) method, is proposed for deep level transient spectroscopy (DLTS) (MP-DLTS). The MP method offers the least statistical variance of the estimates in the presence of noise. Simulation tests have shown this method to lead to a significant improvement in DLTS resolution even for low trap concentrations. Its noise sensitivity and resolution are quantified and compared with five different DLTS analysis techniques. The MP-DLTS method is found to outperform both DLTS spectrum and direct transient analysis techniques. An experimental investigation of the electrically active defects induced by a germanium preamorphization step prior to dopant implantation was undertaken using the MP-DLTS method. Two electron traps were detected in all samples and characterized
Year
DOI
Venue
1998
10.1109/19.744327
Instrumentation and Measurement, IEEE Transactions
Keywords
Field
DocType
deep level transient spectroscopy,eigenvalues and eigenfunctions,electron traps,elemental semiconductors,germanium,matrix decomposition,matrix inversion,phosphorus,silicon,Si:P,Ge,capacitance transient analysis,deep level transient spectroscopy,eigenvalues,electrically active defects,electron traps,figure of merit,germanium preamorphization step,low trap concentrations,matrix pencil method,multiexponential transient,noise sensitivity,simulation tests,statistical variance
Capacitance,Matrix pencil,Dopant,Deep-level transient spectroscopy,Matrix decomposition,Germanium,Electronic engineering,Mathematics,Silicon,Electron
Journal
Volume
Issue
ISSN
47
3
0018-9456
Citations 
PageRank 
References 
1
0.41
2
Authors
4
Name
Order
Citations
PageRank
F. Boussaid161.08
F. Olivié210.75
M. Benzohra322.53
A. Martinez431.94