Name
Abstract | ||
|---|---|---|
Lithographic limitations and manufacturing uncertainties are resulting in fabricated shapes on wafer that are topologically equivalent, but geometrically different from the corresponding drawn shapes. While first-order sensitivity information can measure the change in pattern parasitics when the shape variations are small, there is still a need for a high-order algorithm that can extract parasitic variations incrementally in the presence of a large number of simultaneous shape variations. This paper proposes such an algorithm based on the well-known method of floating random walk (FRW). Specifically, we formalize the notion of random path sharing between several conductors undergoing shape perturbations and use it as a basis of a fast capacitance sensitivity extraction algorithm and a fast incremental variational capacitance extraction algorithm. The efficiency of these algorithms is further improved with a novel FRW method for dealing with layered media. Our numerical examples show a 10X speed up with respect to the boundary-element method adjoint or finite-difference sensitivity extraction, and more than 560X speed up with respect to a non-incremental FRW method for a high-order variational extraction.
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Year | DOI | Venue |
|---|---|---|
2008 | 10.1109/ICCAD.2008.4681647 | San Jose, CA |
Keywords | Field | DocType |
boundary-value problems,capacitance measurement,finite difference methods,perturbation theory,boundary-element method,capacitance,capacitance solver,extraction algorithm,finite-difference sensitivity extraction,floating random walk,high-order algorithm,incremental variation-aware extraction,layered media,lithography,pattern parasitics,random path sharing,shape perturbations | Algorithm design,Capacitance,Random walk,Computer science,Electronic engineering,Finite difference method,Boundary element method,Solver,Parasitic extraction,Speedup | Conference |
ISSN | ISBN | Citations |
1092-3152 E-ISBN : 978-1-4244-2820-5 | 978-1-4244-2820-5 | 10 |
PageRank | References | Authors |
1.98 | 11 | 3 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Tarek A. El-Moselhy | 1 | 91 | 9.34 |
| Ibrahim M. Elfadel | 2 | 73 | 10.74 |
| Luca Daniel | 3 | 497 | 50.96 |