Name
Abstract | ||
|---|---|---|
In order to develop a new structure microwave probe, the fabrication of AFM probe on the GaAs wafer was studied. A waveguide was introduced by evaporating Au film on the top and bottom surfaces of the GaAs AFM probe. A tip having 8 mum high, and curvature radius about 50 nm was formed. The dimensions of the cantilever are 250times30times15 mum. The open structure of the waveguide at the tip of the probe was introduced by using FIB fabrication. AFM topography of a grating sample was measured by using the fabricated GaAs microwave probe. The fabricated probe was found having nanometer scale resolution, and microwave emission was detected successfully at the tip of the probe by approaching Cr-V steel and Au wire samples. |
Year | DOI | Venue |
|---|---|---|
2008 | 10.1109/DTIP.2008.4752974 | Computing Research Repository |
Keywords | DocType | Volume |
alloy steel,atomic force microscopy,cantilevers,gold,microwave devices,microwave spectra,nanoelectromechanical devices,nanostructured materials,probes,surface topography,vacuum deposited coatings,waveguides,afm probe,au,cr-v steel,fib fabrication,feccrvjk,gaas,gaas wafer,atomic force microscope,cantilever,evaporation deposition,gold film,gold wire,grating topography,microwave emission,nanostructural microwave probe,waveguide | Journal | abs/0805.0 |
ISSN | ISBN | Citations |
Dans Symposium on Design, Test, Integration and Packaging of
MEMS/MOEMS - DTIP 2008, Nice : France (2008) | 978-2-35500-006-5 | 0 |
PageRank | References | Authors |
0.34 | 2 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| yang ju | 1 | 1 | 1.16 |
| M. Hamada | 2 | 0 | 0.34 |
| Tetsuya Kobayashi | 3 | 10 | 7.03 |
| Hitoshi Soyama | 4 | 0 | 0.34 |