Title
Robust CMOS Micromachined Inductors With Structure Supports for Gilbert Mixer Matching Circuits
Abstract
In this brief, three novel structure supports for on-chip CMOS-based micromachined inductors are proposed to improve mechanical stability. The inductors are fabricated using a two-step maskless post-CMOS process. A 3-D electromagnetic inductor simulation model is established for performance analysis of the inductors before fabrication. The proposed inductors are applied in the matching network of the double-balanced Gilbert mixer to improve the performance and mechanical reliability for mobile communication. The mixers with and without micromachined process inductors are fabricated in a 0.5-mum CMOS process. The measurement results show an 18.6% increase in the conversion gain, a 31.7% improvement in the third intercept point (IIP3), and a 25.3% reduction in the noise figure.
Year
DOI
Venue
2009
10.1109/TCSII.2009.2020925
Circuits and Systems II: Express Briefs, IEEE Transactions
Keywords
Field
DocType
CMOS integrated circuits,inductors,micromechanical devices,mixers (circuits),mobile communication,3D electromagnetic inductor simulation model,CMOS micromachined inductor fabrication,Gilbert mixer matching circuit,mechanical reliability,microelectromechanical system,mobile communication,noise figure reduction,size 0.5 mum,CMOS,input matching,mechanical stability,microelectromechanical systems (MEMS),mixer,reactive ion etching (RIE)
Computational electromagnetics,Semiconductor device modeling,Noise figure,Inductor,CMOS,Electronic engineering,Robustness (computer science),Electronic circuit,Electrical engineering,Mathematics,Fabrication
Journal
Volume
Issue
ISSN
56
6
1549-7747
Citations 
PageRank 
References 
0
0.34
2
Authors
2
Name
Order
Citations
PageRank
Jerry C. Wu100.34
Mona E. Zaghloul27319.65