Title | ||
---|---|---|
Robust CMOS Micromachined Inductors With Structure Supports for Gilbert Mixer Matching Circuits |
Abstract | ||
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In this brief, three novel structure supports for on-chip CMOS-based micromachined inductors are proposed to improve mechanical stability. The inductors are fabricated using a two-step maskless post-CMOS process. A 3-D electromagnetic inductor simulation model is established for performance analysis of the inductors before fabrication. The proposed inductors are applied in the matching network of the double-balanced Gilbert mixer to improve the performance and mechanical reliability for mobile communication. The mixers with and without micromachined process inductors are fabricated in a 0.5-mum CMOS process. The measurement results show an 18.6% increase in the conversion gain, a 31.7% improvement in the third intercept point (IIP3), and a 25.3% reduction in the noise figure. |
Year | DOI | Venue |
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2009 | 10.1109/TCSII.2009.2020925 | Circuits and Systems II: Express Briefs, IEEE Transactions |
Keywords | Field | DocType |
CMOS integrated circuits,inductors,micromechanical devices,mixers (circuits),mobile communication,3D electromagnetic inductor simulation model,CMOS micromachined inductor fabrication,Gilbert mixer matching circuit,mechanical reliability,microelectromechanical system,mobile communication,noise figure reduction,size 0.5 mum,CMOS,input matching,mechanical stability,microelectromechanical systems (MEMS),mixer,reactive ion etching (RIE) | Computational electromagnetics,Semiconductor device modeling,Noise figure,Inductor,CMOS,Electronic engineering,Robustness (computer science),Electronic circuit,Electrical engineering,Mathematics,Fabrication | Journal |
Volume | Issue | ISSN |
56 | 6 | 1549-7747 |
Citations | PageRank | References |
0 | 0.34 | 2 |
Authors | ||
2 |
Name | Order | Citations | PageRank |
---|---|---|---|
Jerry C. Wu | 1 | 0 | 0.34 |
Mona E. Zaghloul | 2 | 73 | 19.65 |