Title
A model-based approach to multi-modal mass tuning of a micro-scale resonator
Abstract
The signal-to-noise ratio of axisymmetric vibratory gyroscopes is maximized when a pair of coriolis-coupled modes resonate at the same frequency. The manufacturing process of micro-scale resonators creates random minute mass and stiffness asymmetries that cause the natural frequencies of these modes to deviate from one another, thereby degrading sensor performance. One method of “tuning” these modal frequencies to equality involves using electrostatic forces to selectively soften the stiffness at points in the resonant structure. This generally requires large volume electronics that are incompatible with application requirements common to these sensors. Alternatively, modal frequency tuning by mass perturbation of the resonator is a promising approach because it is permanent and requires no ancillary electronics. In this paper, a novel micro-scale resonator is presented which lends itself to mass perturbation experiments. A resonator model, based on empirical frequency response data, is used to guide the mass perturbation process and demonstrates how multiple pairs of modes can be tuned.
Year
DOI
Venue
2012
10.1109/ACC.2012.6315550
American Control Conference
Keywords
Field
DocType
Coriolis force,elastic constants,frequency response,gyroscopes,micromechanical resonators,microsensors,perturbation techniques,tuning,Coriolis-coupled mode,ancillary electronics,application requirements,axisymmetric vibratory gyroscope,electrostatic force,empirical frequency response data,large volume electronics,manufacturing process,microscale resonator,modal frequency tuning,model-based approach,multimodal mass tuning,natural frequency,random minute mass asymmetry,resonant structure,resonator mass perturbation,resonator model,sensor performance degradation,signal-to-noise ratio,stiffness asymmetry
Rotational symmetry,Gyroscope,Frequency response,Control theory,Stiffness,Resonator,Control engineering,Perturbation (astronomy),Modal,Modal analysis,Physics
Conference
ISSN
ISBN
Citations 
0743-1619 E-ISBN : 978-1-4673-2102-0
978-1-4673-2102-0
0
PageRank 
References 
Authors
0.34
2
3
Name
Order
Citations
PageRank
David Schwartz1107.25
Dennis Kim200.68
Robert T. M'Closkey300.34