Paper Info
Title
Mode localization in coupled AlN/SCS cantilevers for highly sensitive resonating flow meter
Abstract
The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive mass detection and analyte identification. Our recent work (NEMS 2012) focused on enhancing the amount of amplitude change due to vibration mode localization with a beam shaped 3-resonator array. The preliminarily results were discussed from view point of vibration characteristic by comparing experimental results with analytical ones, without a small mass perturbation. The present study however try to apply the consequent amplitude change to resonating-based flow meter with a simplified system of beam shaped 2-resonator array (AlN/SCS). The possible application has been analytically discussed from view point of vibration characteristic with a small mass perturbation.
Year
DOI
Venue
2013
10.1109/NEMS.2013.6559934
NEMS
Keywords
Field
DocType
beams (structures),cantilevers,flow measurement,flowmeters,micromechanical resonators,vibrations,beam shaped 2-resonator array,beam shaped 3-resonator array,coupled aln-scs cantilevers,high-sensitive resonating flowmeter,mechanically-coupled beam-shaped resonators,resonating-based flow meter,ultrasensitive mass detection,vibration characteristic,vibration mode localization,coupling overhang,eigenstate shift (amplitude change),mechanically-coupled resonator array,small mass perturbation,resonating flow meter,couplings,sensors,resonant frequency
Analytical chemistry,Cantilever,Flow measurement,Resonator,Beam (structure),Analyte,Vibration,Amplitude,Nanoelectromechanical systems,Materials science
Conference
ISBN
Citations 
PageRank 
978-1-4673-6351-8
0
0.34
References 
Authors
2
5
Name
Order
Citations
PageRank
kenji kozuka100.34
Dong F. Wang214.20
Tsuyoshi Ikehara343.70
keisuke chatani400.34
Ryutaro Maeda513.52