Paper Info
Title
Modeling and fabrication of an RF MEMS variable capacitor with a fractal geometry
Abstract
In this paper, we model, fabricate, and measure an electrostatically actuated MEMS variable capacitor that utilizes a fractal geometry and serpentine-like suspension arms. Explicitly, a variable capacitor that possesses a top suspended plate with a specific fractal geometry and also possesses a bottom fixed plate complementary in shape to the top plate has been fabricated in the PolyMUMPS process. An important benefit that was achieved from using the fractal geometry in designing the MEMS variable capacitor is increasing the tuning range of the variable capacitor beyond the typical ratio of 1.5. The modeling was carried out using the commercially available finite element software COMSOL to predict both the tuning range and pull-in voltage. Measurement results show that the tuning range is 2.5 at a maximum actuation voltage of 10V.
Year
DOI
Venue
2013
10.1109/ISCAS.2013.6572438
Circuits and Systems
Keywords
Field
DocType
electrostatic actuators,finite element analysis,fractals,varactors,PolyMUMPS process,RF MEMS variable capacitor,electrostatic actuator,finite element software COMSOL,fractal geometry,pull-in voltage,serpentine-like suspension arms,suspended plate
Capacitance,Variable capacitor,Capacitor,Microelectromechanical systems,Computer science,Voltage,Fractal,Finite element method,Electronic engineering,Radio frequency
Conference
ISSN
ISBN
Citations 
0271-4302
978-1-4673-5760-9
0
PageRank 
References 
Authors
0.34
0
3
Name
Order
Citations
PageRank
Amro M. Elshurafa182.02
Khaled N. Salama234546.11
Ho, P.H.300.34