Name
Abstract | ||
|---|---|---|
We report a multi-physics simulation and layout design technique for integrated-MEMS (microelectromechanical systems) based on an electrical circuit simulator. A solver for the mechanical equation of motion has been programmed in a Verilog-A compatible HDL (hardware description language) within the Cadence Virtuoso environment to attain new designing capabilities including automatic mask layout synthesis, DRC (design rule check), and LVS (layout-versus-schematic) verification for MEMS structures. Microelectromechanical components such as parallel-plate actuator and bending suspension are interpreted into HDL-coded equivalent circuits. Electrostatic displacement hysteresis is numerically simulated as a lumped mass-and-spring system and verified against the corresponding analytical simulation results. A multi-physics model for the Colpitts oscillator circuit has been built in the developed simulation environment, and its self-excited resonance has been confirmed by the simulation. |
Year | Venue | Keywords |
|---|---|---|
2013 | MIXDES | bending,circuit simulation,electric actuators,electrostatics,equivalent circuits,hardware description languages,integrated circuit layout,masks,micromechanical devices,mixed analogue-digital integrated circuits,numerical analysis,oscillators,suspensions (mechanical components),cadence virtuoso environment,colpitts oscillator circuit,drc,hdl-coded equivalent circuit,lvs,verilog-a compatible hdl programming,automatic mask layout synthesis,bending suspension,design rule check,electrical circuit simulator,electrostatic displacement hysteresis,hardware description language,integrated mems structure,layout design technique,layout-versus-schematic verification,lumped mass-and-spring system,microelectromechanical system,mixed-design technique,motion mechanical equation,multiphysics simulation,numerical simulation,parallel-plate actuator,self-excited resonance,equivalent circuit,integrated mems,multi-physics simulation,actuators,force |
DocType | ISBN | Citations |
Conference | 978-83-63578-00-8 | 4 |
PageRank | References | Authors |
1.10 | 0 | 4 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| Hiroshi Toshiyoshi | 1 | 24 | 13.54 |
| Tsuyoshi Konishi | 2 | 30 | 11.56 |
| Katsuyuki Machida | 3 | 18 | 6.81 |
| Kazuya Masu | 4 | 120 | 36.37 |