Title
Indium Tin Oxide Film Characterization at 0.1–20 GHz Using Coaxial Probe Method
Abstract
Indium tin oxide (ITO) is one of the most commonly used optically transparent conductors in applications, such as electro-optic antennas, displays, and optical coatings. However, their RF frequency-dependent electrical properties have not been reported in the literature. In this paper, we present measurements of the electrical properties (permittivity and conductivity) of ITO films in the 0.1–20-GHz frequency range. Measurements were carried out using an in-house open-ended coaxial probe technique employing a one-port reflection coefficient. As usual, calibration and numerical post-processing is needed to extract the electrical properties of the ITO film placed on a 0.5-mm-thick Eagle glass. The measured conductivity was on the order of throughout the frequency range, and the real and imaginary parts of the permittivity were on the order of at lower frequencies and at higher frequencies.
Year
DOI
Venue
2015
10.1109/ACCESS.2015.2433062
Access, IEEE
Keywords
Field
DocType
calibration,indium tin oxide (ito),open ended coaxial probe,thin film characterization,conductivity,conductors,ito,electrical conductivity,reflectivity,indium tin oxide,permittivity,optical imaging,thin films
Optical coating,Permittivity,Transparent conducting film,Computer science,Electrical conductor,Relative permittivity,Reflection coefficient,Thin film,Optoelectronics,Distributed computing,Indium tin oxide
Journal
Volume
ISSN
Citations 
3
2169-3536
1
PageRank 
References 
Authors
0.48
0
3
Name
Order
Citations
PageRank
Elias A. Alwan153.20
Asimina Kiourti2228.01
Volakis, J.L.3157.17