Name
Abstract | ||
|---|---|---|
This paper presents an energy-efficient readout circuit for micro-machined resonant sensors. It operates by briefly exciting the sensor at a frequency close to its resonance frequency, after which resonance frequency and quality factor are determined from a single ring-down transient. The circuit employs an inverter-based trans-impedance amplifier to sense the ring-down current, with a programmable feedback network to enable the readout of different resonant sensors. An inverter-based comparator with dynamically-adjusted threshold levels tracks the ring-down envelope to measure quality factor, and detects zero crossings to measure resonance frequency. The excitation frequency is dynamically adjusted to accommodate large resonance frequency shifts. Experimental results obtained with a prototype fabricated in 0.35 µm standard CMOS technology and three different SiN resonators are in good agreement with conventional impedance analysis. The prototype achieves a frequency resolution better than 30 ppm while consuming less than 80 nJ/meas from a 1.8 V supply, which is 7.8x less than the state-of-the-art. |
Year | DOI | Venue |
|---|---|---|
2016 | 10.1109/JSSC.2015.2470552 | Solid-State Circuits, IEEE Journal of |
Keywords | Field | DocType |
Energy efficiency,MEMS resonant sensors readout,frequency tracking technique,inverter-based front-end,ring-down measurement | LC circuit,Comparator,Computer science,Resonator,CMOS,Electronic engineering,Electrical impedance,Resonance,RLC circuit,Electrical engineering,Amplifier | Journal |
Volume | Issue | ISSN |
51 | 1 | 0018-9200 |
Citations | PageRank | References |
2 | 0.85 | 4 |
Authors | ||
3 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| Jiang, H. | 1 | 5 | 1.98 |
| Zu-yao Chang | 2 | 22 | 8.75 |
| Michiel A. P. Pertijs | 3 | 90 | 24.37 |