Name
Year | DOI | Venue |
|---|---|---|
2012 | 10.1109/ICICDT.2012.6232854 | ICICDT |
Keywords | Field | DocType |
rough surfaces,etching,plasma etching,silicon,optical interferometry,repeated measures,scanning electron microscopy,through silicon via | Plasma etching,Wafer,Etching,Scanning electron microscope,Electronic engineering,Interferometry,Engineering,Trench,Measured depth,Silicon | Conference |
Citations | PageRank | References |
0 | 0.34 | 0 |
Authors | ||
4 | ||
Name | Order | Citations | PageRank |
|---|---|---|---|
| T Dao | 1 | 10 | 1.89 |
| tania thomas | 2 | 0 | 0.34 |
| David Marx | 3 | 79 | 5.70 |
| David Grant | 4 | 0 | 1.01 |