Name
Abstract | ||
|---|---|---|
The extremely low frequency (ELF) magnetic field has significant impact on yield rate especially when the processing reaches less than 14 nanometer in next-generation nano-Fab. For sensitive equipments such as the SEMs, TEMs, STEMs, FIB writers, and E-beam writers, it suggests that the ELF magnetic field should be lower than 0.5 milli-Gauss to guarantee good yield. Therefore, mitigating the magnetic field by active/passive approaches such as the material shielding, wire permutation, and active canceling are highly demanded.This paper focuses on the development of an active magnetic field canceling system which consists of sensors, current driven unit, and Helmholtz coils. First of all, a sensor is used to detect the magnetic field. A number of procedures such as amplifying, reversing and filtering are then involved in processing the signals. Finally, the current driven unit, i.e. the power amplifier, delivers a reversed current to the Helmholtz coil to create a canceling magnetic field which is in equal magnitude but almost out of phase with respect to the environmental one.According to the experiments, the prototype design is able to reduce the magnetic field intensity from 10.6mG to 1mG at 60Hz. |
Year | DOI | Venue |
|---|---|---|
2013 | 10.1109/EMCCompo.2013.6735184 | 2013 9TH INTERNATIONAL WORKSHOP ON ELECTROMAGNETIC COMPATIBILITY OF INTEGRATED CIRCUITS (EMC COMPO 2013) |
Keywords | DocType | Citations |
ELF(extremely low frequency), sensor, Helmholtz Coil, prototype | Conference | 0 |
PageRank | References | Authors |
0.34 | 0 | 7 |
Name | Order | Citations | PageRank |
|---|---|---|---|
| weili sun | 1 | 0 | 0.68 |
| fengchang chuang | 2 | 0 | 0.34 |
| yulin song | 3 | 0 | 0.34 |
| chwen yu | 4 | 0 | 0.34 |
| Tzyh-Ghuang Ma | 5 | 0 | 1.01 |
| Tzong-Lin Wu | 6 | 4 | 2.77 |
| luhmaan chang | 7 | 0 | 0.34 |