Title
Design Of A 0.6-V 0.2-Mw Cmos Mems Accelerometer
Abstract
This paper presents a low-voltage low-power monolithic complementary metal-oxide-semiconductor (CMOS) micro-electromechanical-system (MEMS) accelerometer design. This design utilizes low-voltage design techniques without using low-threshold devices or internal supply voltage boosting. The accelerometer, designed in the 0.18-mu m CMOS MEMS process, contains the micro-mechanical structure, readout circuits, and a 16-bit delta-sigma analog-to-digital converter (Delta Sigma ADC). It occupies an area of only 0.8 x 1 mm(2) and draws 0.33 mA of current from a 0.6-V supply. The simulated sensitivity is 3000 LSB/g and the nonlinearity is 0.78% within the +/- 6 g sensing range.
Year
DOI
Venue
2015
10.1109/ICCE-TW.2015.7216989
2015 IEEE INTERNATIONAL CONFERENCE ON CONSUMER ELECTRONICS - TAIWAN (ICCE-TW)
Keywords
DocType
Citations 
accelerometers,sensitivity,cmos integrated circuits,logic gates,fluctuations
Conference
0
PageRank 
References 
Authors
0.34
0
6
Name
Order
Citations
PageRank
pochang wu101.35
Bin-Da Liu2123.39
chihyuan yeh300.68
sheghsiang tseng400.34
Hann-Huei Tsai5219.22
Ying-zong Juang63813.94