Title
A high-fidelity, web-based simulator for 300 mm wafer fabs
Year
DOI
Venue
2001
10.1109/ICSMC.2001.973098
SMC
Keywords
Field
DocType
resource management,distributed system,internet,productivity,web based simulation,discrete event simulation,real time,visualization,complex system,engineering graphics,semiconductor device modeling,simulation model,synchronisation,data visualisation,fabrication,computer animation
Synchronization,Data visualization,VRML,Simulation,Computer science,Visualization,Real-time computing,Modular design,Computer animation,Discrete event simulation,Virtual prototyping
Conference
Citations 
PageRank 
References 
4
1.20
2
Authors
8
Name
Order
Citations
PageRank
Hansoo Kim16619.50
Jonghun Park249137.86
SugJe Sohn341.54
Ying Wang4163.32
Spyros A. Reveliotis514018.02
Chen Zhou672.40
Douglas A. Bodner73910.49
Leon F. McGinnis849450.09