Title
UDE-based Trajectory Tracking Control of Piezoelectric Stages
Abstract
The robust and precise control of piezoelectric stages is quite challenging due to the existence of strong hysteresis nonlinearity. In this paper, the dynamics of a piezoelectric stage is identified as a second-order linear system preceded by an input hysteresis characterized by the Prandtl-Ishlinskii (PI) model. Then, a control strategy based on the uncertainty and disturbance estimator (UDE) is developed to mitigate the effect of hysteresis nonlinearity and improve the performance of the positioning control of the piezoelectric stage, without the detailed model of the hysteresis except the slope information of the PI hysteresis asymptotes. Moreover, the stability analysis of the closed-loop system with the UDE-based controller is provided. Extensive experimental results are carried out on a Physik Instrumente P-753.31c piezoelectric stage to demonstrate that the UDE-based controller can achieve excellent performance in trajectory tracking and disturbance rejection, compared to the PID controller and a disturbance-observer-based controller.
Year
DOI
Venue
2016
10.1109/TIE.2016.2542780
IEEE Trans. Industrial Electronics
Keywords
Field
DocType
Piezoelectric stage,Prandtl-Ishlinskii,hysteresis
Control theory,Nonlinear system,Linear system,PID controller,Control theory,Hysteresis,Robustness (computer science),Control engineering,Engineering,Trajectory,Estimator
Journal
Volume
Issue
ISSN
PP
99
0278-0046
Citations 
PageRank 
References 
4
0.43
15
Authors
3
Name
Order
Citations
PageRank
Jinhao Chen1472.14
beibei210012.56
Qing-Chang Zhong341754.97