Paper Info
Title
A High Performance Torque Sensor for Milling Based on a Piezoresistive MEMS Strain Gauge.
Abstract
In high speed and high precision machining applications, it is important to monitor the machining process in order to ensure high product quality. For this purpose, it is essential to develop a dynamometer with high sensitivity and high natural frequency which is suited to these conditions. This paper describes the design, calibration and performance of a milling torque sensor based on piezoresistive MEMS strain. A detailed design study is carried out to optimize the two mutually-contradictory indicators sensitivity and natural frequency. The developed torque sensor principally consists of a thin-walled cylinder, and a piezoresistive MEMS strain gauge bonded on the surface of the sensing element where the shear strain is maximum. The strain gauge includes eight piezoresistances and four are connected in a full Wheatstone circuit bridge, which is used to measure the applied torque force during machining procedures. Experimental static calibration results show that the sensitivity of torque sensor has been improved to 0.13 mv/Nm. A modal impact test indicates that the natural frequency of torque sensor reaches 1216 Hz, which is suitable for high speed machining processes. The dynamic test results indicate that the developed torque sensor is stable and practical for monitoring the milling process.
Year
DOI
Venue
2016
10.3390/s16040513
SENSORS
Keywords
Field
DocType
torque,sensitivity,frequency,MEMS strain gauge
Natural frequency,Torque,Torque sensor,Mechanical engineering,Wheatstone bridge,Machining,Strain gauge,Engineering,Dynamometer,Piezoresistive effect
Journal
Volume
Issue
ISSN
16
4.0
1424-8220
Citations 
PageRank 
References 
2
0.46
0
Authors
5
Name
Order
Citations
PageRank
Yafei Qin141.68
Yulong Zhao24220.76
Yingxue Li320.46
You Zhao472.14
Peng Wang5385106.03