Title
Low-frequency noise in bare SOI wafers: Experiments and model
Abstract
Low-frequency noise (LFN) measurements are largely used for interface quality characterization in MOSFETs. In this work, a detailed investigation of LFN technique applied to pseudo-MOSFETs in bare silicon-on-insulator (SOI) substrates is provided. A physical model capable to describe the experimental results is proposed and validated using different die areas and inter-probe distances. The effective silicon area contributing to the noise signal, the impact of defects induced by probes and the possibility to extract interface trap density are addressed.
Year
DOI
Venue
2015
10.1016/j.sse.2016.07.012
Solid-State Electronics
Keywords
Field
DocType
SOI,Pseudo-MOSFET,Interface trap density,Low-frequency noise
Silicon on insulator,Wafer,Flicker noise,Analytical chemistry,Noise measurement,Infrasound,Electronic engineering,Trap density,MOSFET,Materials science,Silicon
Conference
Volume
ISSN
Citations 
125
0038-1101
0
PageRank 
References 
Authors
0.34
0
4
Name
Order
Citations
PageRank
Luca Pirro100.34
Irina Ionica200.68
Sorin Cristoloveanu336.73
Gérard Ghibaudo45134.87