Title
A FEM simulation approach for multilayered SAW delay line devices.
Abstract
The active compliance control is popular in surgical robots, which requires novel wireless and passive pressure sensor. In this paper, a simulation of surface acoustic wave multilayered device is presented. It includes a SiO2/Al electrode/YZ-LiTaO3, which has a high coupling coefficient as well as a low temperature coefficient of delay. An eigenfrequency analysis is done first to calculate the phase velocity and input frequency of the RF signal. A time domain analysis is pursued next to generate the surface acoustic waves and the characteristics of wave propagation. In this process, the boundary reflection is eliminated by adding perfectly matched layers and appropriate damping. This approach is essential for assessment of SAW pressure sensor design configurations prior to prototyping.
Year
DOI
Venue
2015
10.1109/ROBIO.2015.7418897
ROBIO
Keywords
Field
DocType
SURFACE-ACOUSTIC-WAVE,PRESSURE,FILTERS,DESIGN
Time domain,Wave propagation,Surface acoustic wave,Acoustic wave equation,Surface acoustic wave sensor,Electronic engineering,Pressure sensor,Engineering,Acoustics,Acoustic wave,Coupling coefficient of resonators
Conference
Citations 
PageRank 
References 
0
0.34
0
Authors
2
Name
Order
Citations
PageRank
Zhang Bing100.34
Hu Hong225.31