Paper Info
Title
Simulation studies on model selection in PM planning optimization.
Abstract
In semiconductor manufacturing, preventive maintenance (PM) is complicated and essential. Since tool down time contributes significantly to manufacturing flow variability and thus mean cycle time, effective PM planning is important. Here we extend existing PM planning methods to allow for four categories of PM models. We study the quality of these PM models and the resulting optimized PM plans via simulation. We observe that the approximate mean cycle time formulae for these models are generally of good accuracy. Our studies show that good PM plans suggested from the use of these approximate formulae remain good plans in the true system. Finally, we study the implications of using optimized PM plans generated from one type of model in another type of model. The results suggest that good PM plans are relatively insensitive to which of the four PM models are selected.
Year
DOI
Venue
2015
10.1109/WSC.2015.7408396
Winter Simulation Conference
Field
DocType
ISSN
Systems engineering,Computer science,Semiconductor device fabrication,Model selection,Manufacturing engineering,Downtime,Reliability engineering,Preventive maintenance
Conference
0891-7736
ISBN
Citations 
PageRank 
978-1-4673-9741-4
0
0.34
References 
Authors
0
3
Name
Order
Citations
PageRank
Minho Lee156575.66
James R. Morrison219526.43
Adar A. Kalir3184.70