Title | ||
---|---|---|
Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example |
Abstract | ||
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The fundamental principle of complex systems development consists in integration of a range of design activities related to a set technological processes into the advanced, multistage, time consuming product development chain. The most representative sample smart system includes at least micro-electro-mechanical module (MEMS) assisted by the dedicated readout circuitry (IC) supporting specific signal conversion and data processing capabilities. Communication modules can be integrated in the IC or belong to particular application environment scheme. |
Year | DOI | Venue |
---|---|---|
2014 | 10.1109/3DIC.2014.7152184 | 2014 International 3D Systems Integration Conference (3DIC) |
Keywords | Field | DocType |
Smart system development,MEMS microphone,dynamic pressure measurements,test structure,3D SiP Introduction | Data processing,Smart system,Microelectromechanical systems,Electronic engineering,Integrated circuit design,Solid modeling,Engineering,Co-simulation,Microphone,New product development | Conference |
ISSN | Citations | PageRank |
2164-0157 | 0 | 0.34 |
References | Authors | |
0 | 7 |
Name | Order | Citations | PageRank |
---|---|---|---|
Tomasz Bieniek | 1 | 0 | 2.03 |
Grzegorz Janczyk | 2 | 0 | 1.69 |
Magdalena Ekwinska | 3 | 0 | 0.68 |
T. Budzynski | 4 | 0 | 0.34 |
Piotr Gluszko | 5 | 0 | 0.34 |
Piotr Grabiec | 6 | 2 | 2.61 |
A. Kociubinski | 7 | 0 | 0.68 |