Title
Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example
Abstract
The fundamental principle of complex systems development consists in integration of a range of design activities related to a set technological processes into the advanced, multistage, time consuming product development chain. The most representative sample smart system includes at least micro-electro-mechanical module (MEMS) assisted by the dedicated readout circuitry (IC) supporting specific signal conversion and data processing capabilities. Communication modules can be integrated in the IC or belong to particular application environment scheme.
Year
DOI
Venue
2014
10.1109/3DIC.2014.7152184
2014 International 3D Systems Integration Conference (3DIC)
Keywords
Field
DocType
Smart system development,MEMS microphone,dynamic pressure measurements,test structure,3D SiP Introduction
Data processing,Smart system,Microelectromechanical systems,Electronic engineering,Integrated circuit design,Solid modeling,Engineering,Co-simulation,Microphone,New product development
Conference
ISSN
Citations 
PageRank 
2164-0157
0
0.34
References 
Authors
0
7
Name
Order
Citations
PageRank
Tomasz Bieniek102.03
Grzegorz Janczyk201.69
Magdalena Ekwinska300.68
T. Budzynski400.34
Piotr Gluszko500.34
Piotr Grabiec622.61
A. Kociubinski700.68