Paper Info
Title
Capacity Planning for Cluster Tools in the Semiconductor Industry.
Abstract
This paper proposes a new model for cluster tools with two load locks. Cluster tools are widely used to automate single wafer processing in semiconductor industry. The load locks are the entry points into the vacuum of the cluster tool’s mainframe. Usually there are two of them available. Each lot being processed is dedicated to a single load-lock. Therefore at most two different lots (with possibly different processing times and qualification) can be processed simultaneously. This restriction is one of the major potential bottlenecks.
Year
DOI
Venue
2016
10.1016/j.ijpe.2017.01.005
International Journal of Production Economics
Keywords
Field
DocType
Cluster tool,Capacity planning,Semiconductor industry,Linear programming,Duality
Discrete mathematics,Mathematical optimization,Job shop scheduling,Industrial engineering,Computer science,Parallel processing,Capacity planning,Semiconductor industry
Journal
Volume
ISSN
Citations 
194
0925-5273
0
PageRank 
References 
Authors
0.34
0
2
Name
Order
Citations
PageRank
Martin Romauch1725.42
Richard F. Hartl21863137.30