Title
Semiconductor manufacturing intelligence and automation
Year
DOI
Venue
2016
10.1016/j.cie.2016.06.020
Computers & Industrial Engineering
Field
DocType
Volume
Process automation system,Process development execution system,Semiconductor device fabrication,Automation,Manufacturing engineering,Engineering
Journal
99
Issue
ISSN
Citations 
C
0360-8352
2
PageRank 
References 
Authors
0.38
1
4
Name
Order
Citations
PageRank
Chen-Fu Chien162358.23
Chia-Yu Hsu2332.57
James R. Morrison319526.43
Runliang Dou4989.96